I want to fabricate a PE waveguide.I deposited a layer of aluminum with a thickness of 180 nm on Lithium niobate.I lithographed the design of the waveguide,After developing photoresist and etching the aluminum, the waveguide was interrupted(disconnect) in some parts.in fact aluminum doesn't remove from some places. What is the reason? Could it be because of the quality of the aluminum or not related? In addition,My mask(used in lithography process) is ok.
11
- 2\$\begingroup\$ @MiNiMe That's all right, yes it's in the micro and nano electronic devices fied. \$\endgroup\$Elnaz– Elnaz2023-10-03 17:24:04 +00:00Commented Oct 3, 2023 at 17:24
- 1\$\begingroup\$ @MiNiMe Waveguides are used for a highly specialized subfield of EE: microwave engineering. \$\endgroup\$Hearth– Hearth2023-10-03 18:42:44 +00:00Commented Oct 3, 2023 at 18:42
- 1\$\begingroup\$ we only know what you tell us. How are we to diagnose your depostion/lithography process? You're the only one sitting in front of your substrate, you need to describe it in way more detail, and probably take photos, and explain what you think the possible sources of problems were! \$\endgroup\$Marcus Müller– Marcus Müller2023-10-03 19:32:56 +00:00Commented Oct 3, 2023 at 19:32
- 1\$\begingroup\$ There may be knowledgeable people here, but keep in mind most are practicing or amateur EEs, not so many microelectronics. These questions seem extremely narrow and specific to your process, and therefore would be best addressed to the fab, or whoever is responsible for it e.g. department head, advisor, manager, etc. While the application may be electronic, the process is intimately chemical or physical, and you might have better input from those stacks instead -- but you will need to describe your situation in no less detail. \$\endgroup\$Tim Williams– Tim Williams2023-10-03 19:34:03 +00:00Commented Oct 3, 2023 at 19:34
- 1\$\begingroup\$ @TimWilliams sad but true! I wish there was more people that know their way around solid state electronics and photonics on here – both not my strongest subjects during my EE studies backintehday, but undeniably central EE topics today; and when it comes to the second E in E, they should probably be much more prominent than 555 questions or "how do I switch from battery to USB when available; I haven't researched much" type questions… \$\endgroup\$Marcus Müller– Marcus Müller2023-10-03 22:04:33 +00:00Commented Oct 3, 2023 at 22:04
| Show 6 more comments